The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Oct. 07, 2005
Steven M. Zuniga, Soquel, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Stan D. Tsai, Fremont, CA (US);
Kapila Wijekoon, Palo Alto, CA (US);
Fred C. Redeker, Fremont, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Hung Chih Chen, Sunnyvale, CA (US);
Stan D. Tsai, Fremont, CA (US);
Kapila Wijekoon, Palo Alto, CA (US);
Fred C. Redeker, Fremont, CA (US);
Rajeev Bajaj, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The carrier head has a base and a substrate backing structure for holding a substrate against a polishing surface during polishing. The substrate backing structure is connected to the base and includes an external surface that contacts a backside of the substrate during polishing. The substrate backing structure also includes a resistive heating system to distribute heat over an area of the external surface and at least one thermally conductive membrane. The external surface is a first surface of the at least one thermally conductive membrane, and the resistive heating system is integrated within one of the at least one thermally conductive membrane.