The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2006
Filed:
Oct. 26, 2004
Erik Leonardus Ham, Rotterdam, NL;
Gert-jan Heerens, Schoonhoven, NL;
Robert Gabriël Maria Lansbergen, Schiedam, NL;
Ellard Alexander Meijer, Haarlem, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Hans Meiling, Waalre, NL;
Bastiaan Matthias Mertens, 's-Gravenhage, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Erik Leonardus Ham, Rotterdam, NL;
Gert-Jan Heerens, Schoonhoven, NL;
Robert Gabriël Maria Lansbergen, Schiedam, NL;
Ellard Alexander Meijer, Haarlem, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Hans Meiling, Waalre, NL;
Bastiaan Matthias Mertens, 's-Gravenhage, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
According to an embodiment, a box for transporting a lithographic patterning device is arranged to cooperate with a lithographic apparatus. The transport box may be provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. Prior to transfer of the patterning device from the inner space to the apparatus, the inner space is pressurized. The box may also comprise a closure part for closing the opening, and/or a channel system for evacuating and/or feeding gasses from/to the inner space of the box. Other embodiments include a lithographic apparatus comprising and/or configured to cooperate with such a box.