The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 19, 2006

Filed:

Sep. 20, 2005
Applicants:

Tetsuji Yamashita, Iwaki, JP;

Takashi Kimura, Iwaki, JP;

Hanako Hata, Iwaki, JP;

Inventors:

Tetsuji Yamashita, Iwaki, JP;

Takashi Kimura, Iwaki, JP;

Hanako Hata, Iwaki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 21/18 (2006.01);
U.S. Cl.
CPC ...
Abstract

A CMP conditioner is provided in which diamond grit that is adhered to a conditioning surface so as to face and be in contact with a polishing pad of a CMP apparatus is adhered such that 111 surfaces of crystal surfaces of the diamond grit are substantially parallel with the conditioning surface and face in a direction faced by the conditioning surface.


Find Patent Forward Citations

Yamashita, Tetsuji. (2006). Cmp conditioner (U.S. Patent No. 7150677). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7150677

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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