The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Mar. 10, 2004
Sven Antoin Johan Hol, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Hernes Jacobs, Eindhoven, NL;
Patricia Vreugdewater, Eindhoven, NL;
Koen Jacobus Johannes Marie Zaal, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Hernes Jacobs, Eindhoven, NL;
Patricia Vreugdewater, Eindhoven, NL;
Koen Jacobus Johannes Marie Zaal, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus comprising a highly effective Lorentz actuator, is presented. The Lorentz actuator comprises a main magnet system and a subsidiary magnet system arranged in Halbach configuration, an electrically conductive element for producing a force via the interaction of an electric current carried by the electrically conductive element and a resulting field of the first and second magnetic field generated by the main and subsidiary magnet system, respectively. The actuator further comprises a magnetic element extending substantially between outer sides of the first and second magnet system subassemblies. The magnetic element guides a portion of the second, subsidiary field between the first and second magnet system subassemblies.