The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 21, 2006
Filed:
May. 31, 2005
Hiroshi Matsushita, Ehime, JP;
Mitsuaki Kabasawa, Ehime, JP;
Yoshitaka Amano, Ehime, JP;
Yasuhiko Kimura, Ehime, JP;
Mitsukuni Tsukihara, Ehime, JP;
Junichi Murakami, Ehime, JP;
Hiroshi Matsushita, Ehime, JP;
Mitsuaki Kabasawa, Ehime, JP;
Yoshitaka Amano, Ehime, JP;
Yasuhiko Kimura, Ehime, JP;
Mitsukuni Tsukihara, Ehime, JP;
Junichi Murakami, Ehime, JP;
Sumitomo Eaton Nova Corporation, Tokyo, JP;
Abstract
A beam deflector for scanning performs deflecting of a charged particle beam having a regular trajectory in a vacuum space to thereby periodically change the trajectory of the charged particle beam. The beam deflector comprises a pair of deflection electrodes disposed so as to confront each inner electrode surface having a symmetrical concave extending in a direction of a beam trajectory.