The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Mar. 22, 2004
Wilhelm Ulrich, Aalen, DE;
David R. Shafer, Fairfield, CT (US);
Alexander Epple, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Aurelian Dodoc, Oberkochen, DE;
Wilhelm Ulrich, Aalen, DE;
David R. Shafer, Fairfield, CT (US);
Alexander Epple, Aalen, DE;
Helmut Beierl, Heidenheim, DE;
Aurelian Dodoc, Oberkochen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A catadioptric projection lens for imaging a pattern arranged in an object plane onto an image plane, preferably while creating a real intermediate image, including a catadioptric first lens section having a concave mirror and a physical beamsplitter having a beamsplitting surface, as well as a second lens section that is preferably refractive and follows the beamsplitter, between its object plane and image plane. Positive refractive power is arranged in an optical near-field of the object plane, which is arranged at a working distance from the first optical surface of the projection lens. The beamsplitter lies in the vicinity of low marginal-ray heights, which allows configuring projection lenses that are fully corrected for longitudinal chromatic aberration, while employing small quantities of materials, particularly those materials needed for fabricating their beamsplitters.