The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
Oct. 18, 2004
Rolf Freimann, Aalen, DE;
Bernhard Fellner, Aalen, DE;
Hans-guenther Sachs, Aalen, DE;
Hartmut Brandenburg, Lauchheim, DE;
Bernd Doerband, Aalen, DE;
Frank Schillke, Aalen, DE;
Rolf Freimann, Aalen, DE;
Bernhard Fellner, Aalen, DE;
Hans-Guenther Sachs, Aalen, DE;
Hartmut Brandenburg, Lauchheim, DE;
Bernd Doerband, Aalen, DE;
Frank Schillke, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A method of manufacturing an optical system comprises assembling an optical element on a mounting frame thereof. The mounting frame is disposed on a rotary table having an axis of rotation, and the mounting frame is adjusted such that a predefined axis of symmetry thereof is parallel to the axis of rotation. The optical element is placed on the mounting frame, and an interferometric measurement of a surface of the optical element is performed. The interferometric measurement is analyzed to arrange the optical element relative to the mounting frame such that a predefined axis of the optical element is parallel to the axis of rotation.