The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
May. 04, 2004
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Koen Jacobus Johannes Maria Zaal, Eindhoven, NL;
Aschwin Lodewijk Hendricus Johannes Van Meer, Roosendaal, NL;
Joost Jeroen Ottens, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus having an illumination system for providing a projection beam of radiation; an article support member for supporting an article to be placed in a beam path of the projection beam of radiation on the article support; and a clamp for providing a clamping pressure for clamping the article against the article support during projection. The article support member includes a section that is trimmed for locally adjusting a clamping pressure.