The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Dec. 22, 2005
James P. Garcia, Santa Clara, CA (US);
John M. DE Larios, Palo Alto, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Fred C. Redeker, Fremont, CA (US);
Carl Woods, Aptos, CA (US);
James P. Garcia, Santa Clara, CA (US);
John M. de Larios, Palo Alto, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Fred C. Redeker, Fremont, CA (US);
Carl Woods, Aptos, CA (US);
LAM Research Corporation, Fremont, CA (US);
Abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.