The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 31, 2006
Filed:
Apr. 04, 2003
Yasuji Hiramatsu, Ibi-gun, JP;
Motoo Asai, Ibi-gun, JP;
Naohiro Hirose, Ibi-gun, JP;
Takashi Kariya, Ibi-gun, JP;
Yasuji Hiramatsu, Ibi-gun, JP;
Motoo Asai, Ibi-gun, JP;
Naohiro Hirose, Ibi-gun, JP;
Takashi Kariya, Ibi-gun, JP;
IBIDEN Co., Ltd., Ogaki, JP;
Abstract
A boardis provided with a Cu filmas a conformal mask, in which are formed a register markand an openingthrough which a via hole is formed. A camera senses this register markso that the position of the boardis determined. A laser beam is directed to the approximate position of the opening, so that the openingthrough which the via hole is drilled is formed. The accuracy of the position of the opening of the via hole depends on the accuracy of the position of the openingin the Cu filmas the conformal mask. Therefore, the via hole can be formed at an adequate position despite the low accuracy of the position for laser irradiation.