The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 24, 2006
Filed:
Dec. 15, 2003
Applicants:
Guenter Maul, Aalen, DE;
Norbert Hubig, Gerstetten, DE;
Inventors:
Guenter Maul, Aalen, DE;
Norbert Hubig, Gerstetten, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); F16C 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A device for holding measurement instruments (), in particular interferometers, is formed from a plurality of structure elements () connected to one another and made from at least one material. The at least one material has a very low coefficient of thermal expansion α. The structure elements () on which the measurement instruments () are arranged are secured between at least two structure side parts () in such a way that the thermal expansions of the structure side parts () and of the connections () have no effect in the measurement direction of the measurement instruments ().