The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 10, 2006

Filed:

Sep. 20, 2004
Applicants:

Udo Dinger, Oberkochen, DE;

Frank Eisert, Aalen, DE;

Siegfried Stacklies, Abtsgmuend, DE;

Martin Weiser, Sinsheim, DE;

Guenther Seitz, Spiegelberg, DE;

Inventors:

Udo Dinger, Oberkochen, DE;

Frank Eisert, Aalen, DE;

Siegfried Stacklies, Abtsgmuend, DE;

Martin Weiser, Sinsheim, DE;

Guenther Seitz, Spiegelberg, DE;

Assignee:

Carl Zeiss SMT AG, Oberkochen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/00 (2006.01); B24B 51/00 (2006.01); B24B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of manufacturing an optical element having an optical surface extending close to a periphery of a substrate comprises: providing a substrate having a main surface extending beyond a periphery of the optical surface and also performing a polishing of the optical surface in regions of the main surface extending beyond the optical surface. Thereafter, material of the substrate carrying a portion of the surface extending beyond the optical surface is removed.


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