The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Dec. 19, 2003
Levinus Pieter Bakker, Helmond, NL;
Ralph Kurt, Eindhoven, NL;
Bastiaan Matthias Mertens, Den Haag, NL;
Markus Weiss, Aalen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Wolfgang Singer, Aalen, DE;
Levinus Pieter Bakker, Helmond, NL;
Ralph Kurt, Eindhoven, NL;
Bastiaan Matthias Mertens, Den Haag, NL;
Markus Weiss, Aalen, DE;
Johann Trenkler, Schwaebisch Gmuend, DE;
Wolfgang Singer, Aalen, DE;
ASML Netherlands B.V., Veldhoven, NL;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A cleaning system for removing contamination from at least a part of a surface of a component in a lithographic projection apparatus is disclosed. The cleaning system includes an electric field generator that generates an electric field to provide cleaning particles near the surface of the component.