The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Dec. 01, 2004
Shulin Wang, Campbell, CA (US);
Ulrich Kroemer, Jena, DE;
Lee Luo, Fremont, CA (US);
Aihua Chen, San Jose, CA (US);
Ming LI, Cupertino, CA (US);
Shulin Wang, Campbell, CA (US);
Ulrich Kroemer, Jena, DE;
Lee Luo, Fremont, CA (US);
Aihua Chen, San Jose, CA (US);
Ming Li, Cupertino, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for depositing a tungsten nitride layer is provided. The method includes a cyclical process of alternately adsorbing a tungsten-containing compound and a nitrogen-containing compound on a substrate. The barrier layer has a reduced resistivity, lower concentration of fluorine, and can be deposited at any desired thickness, such as less than 100 angstroms, to minimize the amount of barrier layer material.