The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2006
Filed:
Dec. 13, 2001
Eugene Y. Ivanov, Grove City, OH (US);
Harry W. Conard, Orient, OH (US);
Eugene Y. Ivanov, Grove City, OH (US);
Harry W. Conard, Orient, OH (US);
Tosoh SMD, Inc., Grove City, OH (US);
Abstract
The present application pertains to unconventional sputter target/backing plate assemblies () for high power operation and to the low temperature method of making them. The sputter target/backing plate assemblies () comprise targets () and backing plates () having dissimilar thermal coefficients of expansion. Although the consolidated targets () and backing plates () have dissimilar thermal coefficients of expansion, they are able to be bonded together and used at high sputtering temperatures without bowing or bending and are able to utilize backing plates () normally associated with a specified target metal. In the method of making, a plurality of male projections () are formed in one member of the assembly () with a plurality of corresponding female grooves () formed in the other surface. The assembly () is bonded by conventional techniques around an annular zone that surrounds the male () and female portions (). The assembly () is then pressure consolidated at low temperature so that the projections are force fit into the female recesses.