The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Jun. 16, 2005
Zhiwei (Steve) Xu, Sunnyvale, CA (US);
Jianou Shi, Milpitas, CA (US);
Shiyou Pei, Campbell, CA (US);
Mahmood Mirzaaghaeian, Fremont, CA (US);
Jeffrey A. Rzepiela, Sunnyvale, CA (US);
Zhiwei (Steve) Xu, Sunnyvale, CA (US);
Jianou Shi, Milpitas, CA (US);
Shiyou Pei, Campbell, CA (US);
Mahmood Mirzaaghaeian, Fremont, CA (US);
Jeffrey A. Rzepiela, Sunnyvale, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
A method and a system for calibrating the work function of a non-contact voltage sensor are provided. The method includes preparing a reference sample to have a stable work function, measuring a voltage of the sample using a non-contact voltage sensor, and determining a work function correction factor of the sensor from the measured voltage. In turn, the calibrated work function may be used to adjust voltages of substrates measured by the sensor. A corona gun which includes a first electrode and one or more conductive rods is provided. In some embodiments, the conductive rods may be angled between 0 and 90 degrees with respect to a first electrode sidewall and/or be concentrically arranged less than 90 degrees from each other. In addition or alternatively, the corona gun may be adapted to alter its length and/or include a second electrode partially inset within a space surrounded by the first electrode.