The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2006
Filed:
Apr. 05, 2004
Keith Pope, Bedford, NH (US);
David J Mount, North Andover, MA (US);
Laura Rothman, South Kent, CT (US);
Rick C White, Nashua, NH (US);
Clifton Busby, Georges Mills, NH (US);
Stephen B Douglas, Boxborough, MA (US);
Raymond J Doww, Iii, Amherst, NH (US);
Keith Pope, Bedford, NH (US);
David J Mount, North Andover, MA (US);
Laura Rothman, South Kent, CT (US);
Rick C White, Nashua, NH (US);
Clifton Busby, Georges Mills, NH (US);
Stephen B Douglas, Boxborough, MA (US);
Raymond J Doww, III, Amherst, NH (US);
Other;
Abstract
A supercritical fluid cleaning system uses process fluid for operating rotary motors in the chamber with fluid bearings and fluid load levitation for rotating workpieces and impellers. Rotating speed and direction sensors and a home position locator facilitate motor control. Impellers add further agitation of the fluid in the chamber, faster processing, and greater uniformity of supercritical fluid components and increase mass transfer of fluid to the processed surface. Centrifugal operated clips and cassettes hold wafers and impellers. Non-contact, fluid operated rotating mechanisms reduce contamination. Physical, rotational, and shear affects are enhanced through centrifugal forces which can induce the separation of films localized deposits or molecular products of the reaction from the surface. There is a concomitant agitation of fluid, and continuous angular acceleration imparted to the processed surface features.