The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Jul. 06, 2005
Hiroki Oka, Nirasaki, JP;
Hiroki Oka, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A detecting device includes a sensor support body having a pair of arms, and an optical sensor having a combination of a light emitting unit and a light receiving unit disposed on one and the other of the arms, respectively. A control operation section controls a driving section and, with the arms inserted in a cassette, the sensor support body is moved, thereby performing a scanning operation for scanning the substrate by the optical sensor. The scanning operation is set such that a light beam is related to the substrate while vertically moving at a plurality of scanning positions. The control operation section finds out the presence of absence of the substrate and the position of the front end of the substrate within the cassette on the basis of data obtained from the optical sensor during scanning.