The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2006
Filed:
Oct. 30, 2003
Applicants:
Craig M. Carpenter, Boise, ID (US);
Ross S. Dando, Nampa, ID (US);
Philip H. Campbell, Meridian, ID (US);
Inventors:
Craig M. Carpenter, Boise, ID (US);
Ross S. Dando, Nampa, ID (US);
Philip H. Campbell, Meridian, ID (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention includes methods and processes in which microwave radiation is utilized to activate at least one component within a reaction chamber during deposition of a material over a substrate within the reaction chamber.