The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2006
Filed:
Apr. 02, 2001
Christopher A. Bode, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Anthony J. Toprac, Austin, TX (US);
Joyce S. Oey Hewett, Austin, TX (US);
Anastasia Oshelski Peterson, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Michael L. Miller, Cedar Park, TX (US);
Christopher A. Bode, Austin, TX (US);
Alexander J. Pasadyn, Austin, TX (US);
Anthony J. Toprac, Austin, TX (US);
Joyce S. Oey Hewett, Austin, TX (US);
Anastasia Oshelski Peterson, Austin, TX (US);
Thomas J. Sonderman, Austin, TX (US);
Michael L. Miller, Cedar Park, TX (US);
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
A method for initializing process controllers based on tool event data includes providing a tool having a process controller adapted to employ a control model to control an operating recipe of the tool; receiving a tool event notification; and initializing the control model in response to receiving the tool event notification. A manufacturing system includes a tool and a process controller. The tool is adapted to process wafers in accordance with an operating recipe. The process controller is adapted to employ a control model to control the operating recipe in accordance with a control algorithm. The process controller is further adapted to receive a tool event notification and initialize the control model in response to receiving the tool event notification.