The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2006

Filed:

Jun. 26, 2003
Applicants:

Alessandro C. Callegari, Yorktown Heights, NY (US);

Praveen Chaudhari, Briarcliff Manor, NY (US);

Fuad E. Doany, Katonah, NY (US);

James P. Doyle, Bronx, NY (US);

Eileen A. Galligan, Fishkill, NY (US);

James H. Glownia, Somers, NY (US);

Gareth G. Hougham, Ossining, NY (US);

James A. Lacey, Mahopac, NY (US);

Shui-chih Lien, Briarcliff Manor, NY (US);

Minhua LU, Mohegan Lake, NY (US);

Alan E. Rosenbluth, Yorktown Heights, NY (US);

Kei-hsiung Yang, Katonah, NY (US);

Inventors:

Alessandro C. Callegari, Yorktown Heights, NY (US);

Praveen Chaudhari, Briarcliff Manor, NY (US);

Fuad E. Doany, Katonah, NY (US);

James P. Doyle, Bronx, NY (US);

Eileen A. Galligan, Fishkill, NY (US);

James H. Glownia, Somers, NY (US);

Gareth G. Hougham, Ossining, NY (US);

James A. Lacey, Mahopac, NY (US);

Shui-Chih Lien, Briarcliff Manor, NY (US);

Minhua Lu, Mohegan Lake, NY (US);

Alan E. Rosenbluth, Yorktown Heights, NY (US);

Kei-Hsiung Yang, Katonah, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/02 (2006.01); C23C 14/14 (2006.01); C23C 14/48 (2006.01); C23C 14/58 (2006.01); G02F 1/1337 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.


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