The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Nov. 16, 2004
James Pan, Fishkill, NY (US);
John Pellerin, Hopewell Junction, NY (US);
Linda R. Black, Wappingers Falls, NY (US);
Michael Chudzik, Beacon, NY (US);
Rajarao Jammy, Hopewell Junction, NY (US);
James Pan, Fishkill, NY (US);
John Pellerin, Hopewell Junction, NY (US);
Linda R. Black, Wappingers Falls, NY (US);
Michael Chudzik, Beacon, NY (US);
Rajarao Jammy, Hopewell Junction, NY (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
International Business Machines, Armonk, NY (US);
Abstract
A semiconductor device with a replacement metal gate and the process for making the same removes a dummy gate from a semiconductor device. Within the recess left by the dummy gate is a silicon layer on a gate dielectric layer. A replacement metal is deposited on the thin silicon layer and then reacted with the silicon layer to form a metal-rich silicon layer on the gate dielectric layer.