The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2006
Filed:
Oct. 06, 2003
Manabu Hashikura, Itami, JP;
Hirohiko Nakata, Itami, JP;
Masuhiro Natsuhara, Itami, JP;
Akira Kuibira, Itami, JP;
Manabu Hashikura, Itami, JP;
Hirohiko Nakata, Itami, JP;
Masuhiro Natsuhara, Itami, JP;
Akira Kuibira, Itami, JP;
Sumitomo Electric Industries, Ltd., Osaka, JP;
Abstract
Temperature gauge, and ceramic susceptors and semiconductor manufacturing equipment utilizing the temperature gauge, in which the thermocouple may be easily replaced even if damaged, and in which heat from the temperature-gauging site is readily transmitted to the temperature-gauging contact, shortening time until the measurement temperature stabilizes. A temperature-gauging contact () in the tip of the thermocouple contacts, in an exposed-as-it-is state, a temperature-gauging site on a ceramic susceptor (), and by means of a circular cylindrical-shaped retaining member () screwed into female threads in the ceramic susceptor () is detachably pressed upon and retained against the ceramic susceptor. Thermocouple lead lines (), passing through a through-hole () in the retaining member (), stretch from one end face to the other end face thereof. The retaining member may be provided with a flange having threaded holes and screwlocked into female screws in the ceramic susceptor.