The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2006
Filed:
Mar. 11, 2004
Sven Antoin Johan Hol, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Patricia Vreugdewater, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Edwin Johan Buis, Belfeld, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Patricia Vreugdewater, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Lorentz actuators generate heat due to electrical dissipation in the field coils. As the field through the coils changes, eddy currents are induced in cooling elements leading to undesirable damping forces and heating. The present invention provides an improved design that reduces eddy currents by incorporating slits in the cooling element. Slits are preferably perpendicular to the induced electric field and parallel to each other, and reduce the magnitude of the eddy currents by forcing them to take paths of higher electrical resistance.