The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2006
Filed:
Mar. 07, 2003
Applicants:
Yasuhiro Chouno, Tosu, JP;
Norihiro Ito, Tosu, JP;
Keigo Satake, Tosu, JP;
Tadashi Iino, Nirasaki, JP;
Inventors:
Yasuhiro Chouno, Tosu, JP;
Norihiro Ito, Tosu, JP;
Keigo Satake, Tosu, JP;
Tadashi Iino, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo-to, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05D 16/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A common solvent vapor supply sourceand a common processing gas supply sourcesupply ozone gas and steam to a plurality of processing vesselsA,B. Pressures in the processing vessels are regulated by adjusting the openings of the valuable throttle valvesA,B, which are placed in exhaust linesA,B, respectively.