The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Nov. 22, 2002
Tadahiro Ohmi, Sendai-shi, Miyagi 980-0813, JP;
Tomio Uno, Osaka, JP;
Osamu Nakamura, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kouji Nishino, Osaka, JP;
Atsushi Matsumoto, Osaka, JP;
Kazuhiko Sugiyama, Tokyo, JP;
Tadahiro Ohmi, Sendai-shi, Miyagi 980-0813, JP;
Tomio Uno, Osaka, JP;
Osamu Nakamura, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Kouji Nishino, Osaka, JP;
Atsushi Matsumoto, Osaka, JP;
Kazuhiko Sugiyama, Tokyo, JP;
Abstract
A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor between an orifice and a control valve, to control flow rate through the orifice by a regulating control valve, while calculating the flow from the upstream side pressure. With a temperature sensor, a memory means, and a temperature drift correcting means which calculates drift of the upstream side pressure sensor from data in the memory means when the temperature of the fluid changes and offsets the output drift of the upstream side pressure sensor with the calculated amount of the output drift, temperature drift of the pressure sensor is automatically corrected, enabling accurate control of flow rate.