The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
Dec. 24, 2003
Pertrus Rutgerus Bartray, Ysselsteyn, NL;
Mustafa Amhaouch, Helden Panningen, NL;
Angelo Alexander Michael Van Engelen, Veldhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Tim Anton Johan Meesters, Son en Breugel, NL;
Franciscus Catharina Bernardus Marinus Van Vroonhoven, Eindhoven, NL;
Pertrus Rutgerus Bartray, Ysselsteyn, NL;
Mustafa Amhaouch, Helden Panningen, NL;
Angelo Alexander Michael Van Engelen, Veldhoven, NL;
Paulus Martinus Maria Liebregts, Veldhoven, NL;
Tim Anton Johan Meesters, Son en Breugel, NL;
Franciscus Catharina Bernardus Marinus Van Vroonhoven, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes an illumination system for providing a beam of radiation. The lithographic apparatus further includes: a support structure for supporting patterning device, the patterning device serving to impart the beam with a pattern in its cross-section; a substrate table for holding a substrate; and a projection system for projecting the patterned beam onto a target portion of the substrate. The lithographic apparatus includes a vacuum system in which at least the illumination system and the substrate table are present. The vacuum system includes at least two separate vacuum modules. A first vacuum module includes at least the projection system and/or the illumination system. A second vacuum module includes the substrate table. At least two of the vacuum modules are connected to each other via a closable connection.