The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 18, 2006

Filed:

Sep. 21, 1999
Applicants:

Albert Hasper, Meppel, NL;

Sebastiaan Eliza Nooten, Bilthoven, NL;

Menso Hendriks, Soest, NL;

Inventors:

Albert Hasper, Meppel, NL;

Sebastiaan Eliza Nooten, Bilthoven, NL;

Menso Hendriks, Soest, NL;

Assignee:

ASM International N.V., Bilthoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65H 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

Sorting/storage device for wafers. A sorting device is provided in which at least two cassettes containing wafers may be present and the wafers are moved from one cassette to the other cassette or vice versa. If appropriate, a measuring station may be present in the sorting device. In the immediate vicinity of the sorting device, the cassettes are stored in a magazine which is designed for this purpose and the cassettes are moved using a handling device for cassettes.

Published as:
NL1010317A1; WO0022653A1; NL1010317C2; TW424292B; EP1121712A1; KR20010075625A; JP2002527901A; EP1121712B1; DE69924131D1; DE69924131T2; US7077614B1;

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Quick Actions:

Hasper, Albert. (2006). Sorting/storage device for wafers and method for handling thereof (U.S. Patent No. 7077614). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7077614

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