The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 18, 2006
Filed:
May. 28, 2002
Martin Weiser, Sinsheim, DE;
Udo Dinger, Oberkochen, DE;
Siegfried Stacklies, Abtsgmuend, DE;
Markus Haidl, Aalen, DE;
Martin Weiser, Sinsheim, DE;
Udo Dinger, Oberkochen, DE;
Siegfried Stacklies, Abtsgmuend, DE;
Markus Haidl, Aalen, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A device serves for reflecting electromagnetic waves, in particular in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier. An intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.