The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 11, 2006
Filed:
Aug. 14, 2003
Jun-sik Hong, Gyeonggi-do, KR;
Young-ki Hong, Gyeonggi-do, KR;
Tae-hyuk Ahn, Gyeonggi-do, KR;
Jong-seo Hong, Gyeonggi-do, KR;
Jun-Sik Hong, Gyeonggi-do, KR;
Young-Ki Hong, Gyeonggi-do, KR;
Tae-Hyuk Ahn, Gyeonggi-do, KR;
Jong-Seo Hong, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
An improved method of manufacturing a capacitor on a semiconductor substrate is disclosed. A portion of an insulation film on a semiconductor substrate is etched to form a first opening in the insulation film. A passivation film is formed on the insulation film and within the first opening thereof. A portion of the passivation film on a bottom of the first opening is thinner than portions of the passivation film on the insulation film and on a sidewall of the first opening. The passivation film is etched to expose the bottom of the first opening.