The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Dec. 22, 2004
Takashi Furukawa, Sagamihara, JP;
Takayuki Mizuno, Akishima, JP;
Eiichi Hazaki, Tsuchiura, JP;
Hirofumi Sato, Naka, JP;
Takashi Furukawa, Sagamihara, JP;
Takayuki Mizuno, Akishima, JP;
Eiichi Hazaki, Tsuchiura, JP;
Hirofumi Sato, Naka, JP;
Hitachi High-Technologies Corpoartion, Tokyo, JP;
Abstract
A probe navigation method, a navigation device, and a defect inspection device wherein in a charged particle beam system provided with probes for electrical characteristics evaluation, probing can be easily carried out regardless of the equipment user's level of skill are provided. To attain this object, probes and a test piece stage on which a test piece is placed are driven by independent driving means. Further, a large stage driving means which integrally drives the probes and the test piece stage is provided. In addition, CAD navigation is adopted. This enhances the equipment users' convenience during probing.