The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Jan. 09, 2002
Mark O. Neisser, Whitehouse Station, NJ (US);
Joseph E. Oberlander, Phillipsburg, NJ (US);
Medhat A. Toukhy, Flemington, NJ (US);
Raj Sakamuri, Sharon, MA (US);
Shuji Ding-lee, Branchburg, NJ (US);
Mark O. Neisser, Whitehouse Station, NJ (US);
Joseph E. Oberlander, Phillipsburg, NJ (US);
Medhat A. Toukhy, Flemington, NJ (US);
Raj Sakamuri, Sharon, MA (US);
Shuji Ding-Lee, Branchburg, NJ (US);
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
Disclosed is a process for forming an image on a substrate, comprising the steps of: (a) coating on the substrate a first layer of a radiation sensitive, antireflective composition; (b) coating a second layer of a photoresist composition onto the first layer of the antireflective composition; (c) selectively exposing the coated substrate from step (b) to actinic radiation; and (d) developing the exposed coated substrate from step (c) to form an image; wherein both the photoresist composition and the antireflective composition are exposed in step (c); both are developed in step (d) using a single developer; wherein the antireflective composition of step (a) is a first minimum bottom antireflective coating (B.A.R.C.) composition, having a solids content of up to about 8% solids, and a maximum coating thickness of the coated substrate of wherein λ is the wavelength of the actinic radiation of step (c) and n is the refractive index of the B.A.R.C. composition.