The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Apr. 26, 2005
Kurt R. Lehman, Menlo Park, CA (US);
Shing M. Lee, Fremont, CA (US);
Walter Halmer Johnson, Iii, San Jose, CA (US);
John Fielden, Los Altos, CA (US);
Kurt R. Lehman, Menlo Park, CA (US);
Shing M. Lee, Fremont, CA (US);
Walter Halmer Johnson, III, San Jose, CA (US);
John Fielden, Los Altos, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A method for measuring conductance of a sample using an eddy current probe with a sensing coil. The method includes N repetitions of measuring first and second voltage pairs including in-phase and quadrature components of an induced AC voltage in the sensing coil, calibrating the first signal based on the measured second signal at a different separation from the sample and reference material, determining a conductance function relating conductance with location along the selected curve, processing the calibrated first voltage pairs to generate a lift-off curve, determining an intersection voltage pair representing intersection of the lift-off curve with a selected curve, and determining the conductance of the sample from the intersection voltage pair and the conductance function.