The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 04, 2006
Filed:
Mar. 31, 2003
Applicants:
James P. Garcia, Santa Clara, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl Woods, Aptos, CA (US);
Fred C. Redeker, Fremont, CA (US);
John DE Larios, Palo Alto, CA (US);
Inventors:
James P. Garcia, Santa Clara, CA (US);
Mike Ravkin, Sunnyvale, CA (US);
Carl Woods, Aptos, CA (US);
Fred C. Redeker, Fremont, CA (US);
John de Larios, Palo Alto, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for processing a substrate is provided which includes generating a fluid meniscus on the surface of the vertically oriented substrate, and moving the fluid meniscus over the surface of the vertically oriented substrate to process the surface of the substrate.