The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 27, 2006
Filed:
May. 25, 2005
Akihiko Honma, Chiba, JP;
Akihiko Honma, Chiba, JP;
SII NanoTechnology Inc., Chiba, JP;
Abstract
There is provided a scanning probe microscope capable of simply and accurately confirming whether or not a sample shape satisfies specified conditions. A pseudo reference image Srefcomprises a pair of reference line profiles Lrefand Lrefarranged apart form each other in parallel. An operator moves and rotates the position of the pseudo reference image Srefon a screen so that a sample shape line profile fits between the reference line profiles Lrefand Lrefof the pseudo reference image Sref. If it is possible to fit the line profile of the sample shape between the reference line profiles Lrefand Lref, it is determined that the sample shape is in spec, while if it is not possible to fit the line profile of the sample shape between the reference line profiles Lrefand Lref, no matter how the pseudo reference image Srefis moved and rotated, it is determined that the sample shape is out of spec.