The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Apr. 22, 2004
Applicants:
Noud Jan Gilissen, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Inventors:
Noud Jan Gilissen, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/58 (2006.01); G03B 27/62 (2006.01);
U.S. Cl.
CPC ...
Abstract
A carrier for carrying a lithographic substrate or a lithographic patterning means. The carrier comprises a first member provided with an open hollow structure that is open to at least one side of the member. The carrier further comprises a second member connected to the first member, such that a closed hollow internal structure is formed between the carrier members.