The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 20, 2006
Filed:
Mar. 13, 2003
Applicants:
Makoto Nagashima, Nishi-Tokyo, JP;
Darrell Rinerson, Cupertino, CA (US);
Steve K. Hsia, San Jose, CA (US);
Larry Matheny, Fremont, CA (US);
Inventors:
Makoto Nagashima, Nishi-Tokyo, JP;
Darrell Rinerson, Cupertino, CA (US);
Steve K. Hsia, San Jose, CA (US);
Larry Matheny, Fremont, CA (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A memory fabrication apparatus includes a pair of targets arranged so as to be spaced apart from one another within a closed vacuum vessel, each target of said pair of targets having a sputtering surface facing the sputtering surface of the other target of said pair of targets; and substrate holder adapted to receive facing target sputtering a CMO material on an electrode.