The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2006
Filed:
May. 08, 2002
David Y. Wang, Fremont, CA (US);
Lawrence Rotter, Pleasanton, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Jeffrey E. Mcaninch, Livermore, CA (US);
David Y. Wang, Fremont, CA (US);
Lawrence Rotter, Pleasanton, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Jeffrey E. McAninch, Livermore, CA (US);
Therma-Wave, Inc., Fremont, CA (US);
Abstract
The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path—the light path that connects the illuminator, the sample and the detector—of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.