The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2006
Filed:
May. 19, 2004
Applicants:
Shen-ping Wang, Keelung, TW;
Yuh-hwa Chang, Shulin, TW;
Fei-yuh Chen, Hinchu, TW;
David Ho, Taichung, TW;
Chia-chiang Chen, Hsinchu, TW;
Inventors:
Shen-Ping Wang, Keelung, TW;
Yuh-Hwa Chang, Shulin, TW;
Fei-Yuh Chen, Hinchu, TW;
David Ho, Taichung, TW;
Chia-Chiang Chen, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); B05D 5/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromirror which includes a substrate, a reflective layer comprising pure aluminum overlying the substrate and a protective layer comprising titanium nitride overlying the reflective layer is disclosed.