The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 30, 2006

Filed:

Feb. 11, 2002
Applicants:

Akira Unno, Kamakura, JP;

Takao Yonehara, Atsugi, JP;

Tetsuro Fukui, Yokohama, JP;

Takanori Matsuda, Yokohama, JP;

Kiyotaka Wasa, Nara-shi, Nara-ken, JP;

Inventors:

Akira Unno, Kamakura, JP;

Takao Yonehara, Atsugi, JP;

Tetsuro Fukui, Yokohama, JP;

Takanori Matsuda, Yokohama, JP;

Kiyotaka Wasa, Nara-shi, Nara-ken, JP;

Assignees:

Canon Kabushiki Kaisha, Tokyo, JP;

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/08 (2006.01);
U.S. Cl.
CPC ...
Abstract

A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure.


Find Patent Forward Citations

Loading…