The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Feb. 19, 2004
Kyoung-mi Kim, Anyang-si, KR;
Jae-ho Kim, Yongin-si, KR;
Young-ho Kim, Yongin-si, KR;
Sang-woong Yoon, Seoul, KR;
Boo-deuk Kim, Suwon-si, KR;
Shi-yong Lee, Sungnam-si, KR;
Kyoung-Mi Kim, Anyang-si, KR;
Jae-Ho Kim, Yongin-si, KR;
Young-Ho Kim, Yongin-si, KR;
Sang-Woong Yoon, Seoul, KR;
Boo-Deuk Kim, Suwon-si, KR;
Shi-Yong Lee, Sungnam-si, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A silicone hyper-branched polymer surfactant is included in a rinsing solution which may be used to remove photoresist residues. The silicone hyper-branched polymer surfactant is prepared by polymerizing a monomer represented by the following chemical formula (1), where Rdenotes a vinyl group and Rdenotes hydrogen, and includes both a hydrophobic group and a hydrophilic group