The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Jan. 31, 2003
Ulrich Egger, Kanagawa-ken, JP;
Haoren Zhuang, Tokyo-to, JP;
Yoshinoru Kumura, Tokyo, JP;
Kazuhiro Tomioka, Tokyo, JP;
Hiroyuki Kanaya, Kanagawa-ken, JP;
Ulrich Egger, Kanagawa-ken, JP;
Haoren Zhuang, Tokyo-to, JP;
Yoshinoru Kumura, Tokyo, JP;
Kazuhiro Tomioka, Tokyo, JP;
Hiroyuki Kanaya, Kanagawa-ken, JP;
Infineon Technologies AG, , DE;
Kabushiki Kaisha Toshiba, , JP;
Abstract
The present invention provides a ferroelectric device relatively free of fences by using a hardmask having high etching selectivity relative to an underlying barrier layer. The present invention also includes a method for suppressing the fences clinging to the sidewalls of ferroelectric devices. Additionally, the present invention provides a ferroelectric device having a hardmask relatively thin compared to an underlying barrier layer when compared to prior art devices.