The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Apr. 12, 2005
Donald F. Canaperi, Bridgewater, CT (US);
Timothy J. Dalton, Ridgefield, CT (US);
Stephen M. Gates, Ossining, NY (US);
Mahadevaiyer Krishnan, Hopewell Junction, NY (US);
Satya V. Nitta, Poughquag, NY (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
Sean P. E. Smith, Putnam Valley, NY (US);
Donald F. Canaperi, Bridgewater, CT (US);
Timothy J. Dalton, Ridgefield, CT (US);
Stephen M. Gates, Ossining, NY (US);
Mahadevaiyer Krishnan, Hopewell Junction, NY (US);
Satya V. Nitta, Poughquag, NY (US);
Sampath Purushothaman, Yorktown Heights, NY (US);
Sean P. E. Smith, Putnam Valley, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A structure incorporates very low dielectric constant (k) insulators with copper wiring to achieve high performance interconnects. The wiring is supported by a relatively durable low k dielectric such as SiLk or SiO2 and a very low k and less-robust gap fill dielectric is disposed in the remainder of the structure, so that the structure combines a durable layer for strength with a very low k dielectric for interconnect electrical performance.