The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 2006

Filed:

May. 21, 2003
Applicants:

Thomas Hoffmann, Portland, OR (US);

Chris Auth, Portland, OR (US);

Mark Armstrong, Portland, OR (US);

Stephen Cea, Hillsboro, OR (US);

Inventors:

Thomas Hoffmann, Portland, OR (US);

Chris Auth, Portland, OR (US);

Mark Armstrong, Portland, OR (US);

Stephen Cea, Hillsboro, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8238 (2006.01); H01L 21/84 (2006.01); H01L 21/00 (2006.01); H01L 21/461 (2006.01); H01L 21/31 (2006.01);
U.S. Cl.
CPC ...
Abstract

An integrated circuit is described that comprises a PMOS transistor and an NMOS transistor that are formed on a semiconductor substrate. A silicate glass layer is formed on only the PMOS transistor or the NMOS transistor; and an etch stop layer is formed on the silicate glass layer. Also described is a method for forming an integrated circuit. That method comprises forming a PMOS transistor structure and an NMOS transistor structure on a semiconductor substrate, forming a silicate glass layer on only the PMOS transistor structure or the NMOS transistor structure, and forming an etch stop layer on the silicate glass layer.


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