The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Oct. 22, 2004
Hendrik Antony Johannes Neerhof, Eindhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Marco Le Kluse, Maassluls, NL;
Hendrik Antony Johannes Neerhof, Eindhoven, NL;
Johannes Hubertus Josephina Moors, Helmond, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Marco Le Kluse, Maassluls, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to provide a radiation beam, an article support configured to support an article to be placed in a beam path of the radiation beam, a multipolar clamp configured to provide a clamping pressure for clamping the article against the article support, and a bias voltage circuit for biasing at least one electrode of the multipolar clamp, such that the occurrence of ridges that appear due to static charges on the article may be circumvented.