The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Nov. 06, 2002
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Bastiaan Stephanus Hendrikus Jansen, Loo, NL;
Dominicus Jacobus Petrus Adrianus Franken, Veldhoven, NL;
Bastiaan Stephanus Hendrikus Jansen, Loo, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus comprising at least one of a radiation system and a projection system having at least one of a reflective and a refractive optical member, wherein the optical member is supported by at least one piezoelectric actuator for positioning the optical member. The piezoelectric actuator comprises three parallel plates stacked on top of one another with piezoelectric stacks between the plates.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile