The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Feb. 13, 2004
Udo Dinger, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Martin Weiser, Sinsheim, DE;
Konrad Knapp, Mainz, DE;
Ina Mitra, Stadecken-Elsheim, DE;
Hans Morian, Schlangenbad, DE;
Udo Dinger, Oberkochen, DE;
Frank Eisert, Aalen, DE;
Martin Weiser, Sinsheim, DE;
Konrad Knapp, Mainz, DE;
Ina Mitra, Stadecken-Elsheim, DE;
Hans Morian, Schlangenbad, DE;
Carl-Zeiss SMT AG, Oberkochen, DE;
Schott AG, Mainz, DE;
Abstract
There is provided a substrate material for an optical component for X-rays of wavelength λ. The substrate includes (a) a glass phase made of amorphous material having a positive coefficient of thermal expansion, and (b) a crystal phase including microcrystallites having a negative coefficient of thermal expansion and a mean size of less than about 4 λ. The substrate material has a stoichiometric ratio of the crystal phase to the glass phase such that a coefficient of thermal expansion of the substrate material is less than about 5×10Kin a temperature range of about 20 °C. to 100°C. The substrate material, following a surface treatment, has a high spatial frequency roughness (HSFR) of less than about λ/30 rms.