The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Dec. 19, 2003
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Pieter Johannes Gertrudis Meijers, Horst, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Robertus Nicodemus Jacobus Van Ballegoij, Eindhoven, NL;
Martinus Agnes Willem Cuijpers, Veldhoven, NL;
Pieter Johannes Gertrudis Meijers, Horst, NL;
Gerardus Petrus Matthijs Van Nunen, Berghem, NL;
Joost Jeroen Ottens, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate holder has burls having a height not less than 100 μm and at least 10 vacuum ports arranged within a central region extending to a radius of two thirds the radius of the substrate. Thereby concave wafers can be reliably clamped by generating an initial vacuum in a central region which exerts a clamping force tending to flatten the wafer and allowing the initial vacuum to deepen until the wafer is fully clamped.