The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Aug. 28, 2001
Steven Alan Cordes, Yorktown Heights, NY (US);
Michael James Cordes, Newburgh, NY (US);
James Louis Speidell, Poughquag, NY (US);
Scott Mansfield, Hopewell Junction, NY (US);
Steven Alan Cordes, Yorktown Heights, NY (US);
Michael James Cordes, Newburgh, NY (US);
James Louis Speidell, Poughquag, NY (US);
Scott Mansfield, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Aperture members are provided wherein there is thin 1–10 micrometer thick crystaline membrane that is surrounded by a frame of a bulk type crystalline material. The aperture being an opening through the membrane in a typical shape useful for device fabrication, such as a circle or pattern. The aperture member of the invention can be fabricated out of a typical silicon crystalline wafer in a process where doping in a region serves as an etch stop.