The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Dec. 13, 2002
Tsutomu Higashiura, Nirasaki, JP;
Tsutomu Higashiura, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A matching box is provided with a contact device insertion section serving as a slot into which a contact device is inserted. When the matching box is fixed on the outer wall of the side surface of a vacuum container, the matching box is positioned so as to be in a state where a space margin is provided between itself and a power feeding bar. Thereafter, electric contact between the external circuit and the power feeding bar is established by inserting a contact device into the contact device insertion section. A socketprovided at the output portion of an impedance matching device has, at the center portion of a metal bodyformed into a cylindrical structure, an insertion holefor inserting a power feeding barthereinto to support it A cover layermade of an insulation material is provided on the inner wall of the insertion hole, thereby electrically insulating the insertion holefrom the power feeding bar. A high frequency electricity generated by a second high frequency power sourceis conducted to the power feeding barby inductive coupling.